Integrated Circuits Technology (ILV)

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Course lecturer:

FH-Prof. Dipl.-Ing. Dr.

 Johannes Sturm

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Dipl.-Ing.

 Ewald Wachmann
Course numberM2.02840.10.031
Course codeTechnology
Curriculum2023
Semester of degree program Semester 1
Mode of delivery Presencecourse
Units per week3,5
ECTS credits5,0
Language of instruction English

  • Students are able to understand in detail silicon-based semiconductor devices, including
    • CMOS process flow
    • the wafer fab manufacturing process steps
    • Technology characterization
    • Yield and reliability terms.
  • Students can apply the basics of semiconductor physics to formulate the operation principles of important electronic devices such as
    • pn-junctions
    • bipolar junction transistors (BJT's)
    • MOS transistors.
  • Students can extract a mathematical large-signal and small-signal model of the basic electronic devices for hand-calculations.


  • IC technologies and fabrication including
    • Introduction to semiconductors
    • Explanation of fabrication facilities
    • Integrated circuits process technology steps with emphasis on CMOS technology
    • Integrated circuits packaging
    • Fab-design interfaces
    • Device reliability issues related to design.
  • Basics in semiconductor physics and mathematical modelling of
    • pn-junctions
    • Carrier drift and diffusion in semiconductors
    • Bipolar junction transistors
    • MOS transistor


Lecture material as provided in the course (required)
Recommended reading as follows:

  • S. Wolf, Microchip Manufacturing, Lattice Pr., 2003.
  • S. M. Sze, M. K. Lee, Semiconductor Devices: Physics and Technology,Wiley, 2012.
  • S. M. Sze, Y. L. Li, K. K. Li, Semiconductor Devices, Wiley, 4. Ed., 2021.
  • J. B. Kuo, CMOS VLSI Engineering, Springer, 2013.
  • J. D. Plummer et al., Silicon VLSI Technology: Fundamentals, Practice and Modeling, Pearson College Div., 2020.
  • J. Burghartz, Guide to State-of-the-Art electronic Devices, Wiley-IEEE Press, 2013.


- J. Burghartz Guide to State-of-the-Art electronic devices

Teaching & discussion, collaborative learning based on assignments and homework

Integrated module examination
Immanent examination character: Written/oral exam, including homework assignments, presentations and lecture contribution